DocumentCode
1703407
Title
Atomic Layer Epitaxy
Author
Bedair, S.M.
Author_Institution
North Carolina State University
fYear
1987
Firstpage
108
Lastpage
110
Keywords
Ash; Atomic layer deposition; Epitaxial growth; Gallium arsenide; Large Hadron Collider; MOCVD; Molecular beam epitaxial growth; Process control; Semiconductor films; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location
Ithaca, NY, USA
Type
conf
DOI
10.1109/CORNEL.1987.721219
Filename
721219
Link To Document