Title :
Processing And DC Performance Of Self-Aligned GaAs Gate SISFET
Author :
Chen, M.Y. ; Schaff, W.J. ; Tasker, P.J. ; Eastman, L.F.
Author_Institution :
Cornell University
Keywords :
Artificial intelligence; Electrons; Etching; Gallium arsenide; Implants; Knee; Low voltage; Nanofabrication; Thermal stability; Transconductance;
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location :
Ithaca, NY, USA
DOI :
10.1109/CORNEL.1987.721220
