Title :
Self-aligned Ohmic And Self-Aligned Implant GaAs Gate FET With Integrated Diode
Author :
Yuen, A.T. ; Long, S.I. ; Hu, E.L. ; Patterson, G.A.
Author_Institution :
University of California
Keywords :
FETs; Fabrication; Gallium arsenide; Gold; Implants; Microwave technology; Schottky diodes; Semiconductor diodes; Threshold voltage; Voltage control;
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location :
Ithaca, NY, USA
DOI :
10.1109/CORNEL.1987.721225