Title :
Simulation of an analog differential capacitive accelerometer
Author :
Ahanchian, Ali ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
In this paper, the simulation of an open-loop MEMS capacitive accelerometer in OrCAD (PSPICE A/D), include readout interface are presented. The charge amplifier technique is used for converting the capacitance change of accelerometer to electrical signal. The sensing element is modelled in system behavioural level of PSPICE and the interface circuit is modelled at component level.
Keywords :
accelerometers; capacitive sensors; microsensors; transfer functions; MEMS capacitive accelerometer; OrCAD technology; PSPICE A-D technology; charge amplifier technique; electrical signals; readout interface; Acceleration; Accelerometers; Capacitance; Capacitors; Circuits; Damping; Electrostatics; Frequency; Micromechanical devices; SPICE;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620899
