Title :
Mechanical behaviour of a 10g MEMS noncrossing differential capacitive accelerometer
Author :
Manut, Azrif ; Bais, Badariah ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microengineering & Nanoelectronics, Universiti Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
A MEMS lateral capacitive accelerometer was designed and simulated. The accelerometer used in the study is based on gap-difference principle. It consists of 74 pairs of fingers and the proofmass suspended by two straight truss springs at both ends. Important parameters such as displacement, differential capacitance, harmonic response and sensitivity were studied and results presented. The shock resistance was also simulated to ensure the robustness of the device against external shock. The accelerometer is 40μm thick and 0.6mm 0.7mm in size. It has a resonant frequency of 3.60 kHz at acceleration of 10g.
Keywords :
accelerometers; capacitive sensors; microsensors; 3.60 kHz; 40 micron; MEMS accelerometer; differential capacitance; gap-difference principle; harmonic response; lateral capacitive accelerometer; noncrossing differential capacitive accelerometer; shock resistance; truss springs; Acceleration; Accelerometers; Capacitance; Electric shock; Fingers; Micromechanical devices; Nanoelectronics; Resonant frequency; Robustness; Springs;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620904
