DocumentCode

1703901

Title

Fabrication Technology For Monolithic GaAs VFETs*

Author

Clarke, R.C. ; Driver, M.C. ; O´Keeffe, T.W. ; Wickstrom, R.A.

Author_Institution

Westinghouse Research and Development Center

fYear

1987

Firstpage

316

Lastpage

325

Keywords

Bonding; Bridge circuits; Capacitance; FETs; Fabrication; Feedback; Gallium arsenide; Impedance; MESFETs; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

High Speed Semiconductor Devices and Circuits, 1987. Proceedings., IEEE/Cornell Conference on Advanced Concepts in

Type

conf

DOI

10.1109/CORNEL.1987.721242

Filename

721242