DocumentCode
1704423
Title
Characterisation and process optimisation of photosensitive acrylates for polymeric optical waveguides
Author
Mohamed, Rahmah ; Razali, Noraspalelawati ; Ehsan, Abang Annuar ; Shaari, Sahbudin
Author_Institution
Fac. of Appl. Sci., Universiti Teknologi MARA, Selangor, Malaysia
fYear
2004
Abstract
In this paper, we present our recent progress on the characterisation and process optimisation of photoresist-like fluorinated acrylate and cyclomer acrylate copolymers. Different acrylate formulations from cyclomer acrylates have been exploited and compared with fluorinated polymer from available sources. Both acrylates show negative thermooptic (TO) effect with temperature. The thermooptic coefficient, dn/dT of the polymers are as high as the order of 10-3, which is comparable to those of available optical polymers. Higher values of dn/dT are shown by the fluorinated acrylate compared to that of the cyclomer acrylate type. Characterisation of prebaked and UV cured polymer samples had been analysed using FTIR. The time and intensity of UV curing were optimised to obtain waveguide channel of width between 40μm and 10μm for cyclomer whereas for fluorinated only the UV curing time has been optimised. The development techniques of these acrylates are also different; the cyclomer used the aqueous based developers while the fluorinated acrylate develops use the hydrocarbon solvent. Refractive indices of the cyclomer acrylates is between 1.52-1.53 while the fluorinated type is 1.521. Microstructural channel waveguide had also been analysed via scanning electron microscope (SEM) which shows the channel waveguide structures.
Keywords
Fourier transform spectroscopy; curing; infrared spectroscopy; optical polymers; optical waveguides; polymer blends; refractive index; scanning electron microscopes; thermo-optical effects; UV cured polymer; channel waveguide structures; cyclomer acrylate copolymers; fluorinated polymer; hydrocarbon solvent; microstructural channel waveguide; optical polymers; photoresist fluorinated acrylate; photosensitive acrylates; polymeric optical waveguides; prebaked polymer; process optimisation; refractive indices; scanning electron microscope; thermooptic coefficient; thermooptic effect; waveguide channel; Curing; Optical device fabrication; Optical materials; Optical polymers; Optical refraction; Optical variables control; Optical waveguides; Resists; Solvents; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN
0-7803-8658-2
Type
conf
DOI
10.1109/SMELEC.2004.1620926
Filename
1620926
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