Title :
Determination of thermo-optic coefficient of a UV curable polymer using prism coupling technique
Author :
Yusop, Azrulnizam ; Kassir, Aiman ; Ehsan, Abang Annuar ; Shaari, Sahbudin
Author_Institution :
Inst. of Micro Eng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
In this report, a new advanced prism coupler with temperature-controlled system is utilised for measuring the refractive indices and thickness of polymer thin film. This coupler is capable of measuring the variation of refractive indices with temperature. The refractive indices, n and thickness, d of the materials have been measured in the temperature range of 30 C to 80 C. The double-layered waveguide on silicon, which uses Ormocer b59 (Ormocore) as the core layer and Ormocer b66 (Ormoclad) as the bottom cladding layer, have been fabricated and used for the measurement. The thermo-optic coefficients (dn/dt) for both materials have been obtained.
Keywords :
curing; optical couplers; optical polymers; optical prisms; polymer films; refractive index measurement; silicon; thermo-optical effects; 30 to 80 C; Ormocer b59 layer; Ormocer b66 layer; Si; UV curable polymer; bottom cladding layer; double-layered waveguide; polymer thin film; prism coupling technique; refractive indices; temperature controlled system; thermo-optic coefficient; Arrayed waveguide gratings; CMOS technology; Costs; Optical films; Optical materials; Optical polymers; Optical refraction; Optical waveguides; Polymer films; Silicon;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620931