Title :
Fabrication of polymeric optical waveguides by B-staged bisbenzocyclobutene (BCB)
Author :
Gang, Shee Yu ; Kassim, Norazan Mohd ; Mohammad, Abu Bakar ; Ibrahim, Mohd Haniff
Author_Institution :
Fac. of Electr. Eng., Univ. Teknologi Malaysia, Johor, Malaysia
Abstract :
This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzocyclobutene (BCB) from DOW Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.
Keywords :
etching; glass; optical planar waveguides; optical polymers; B-staged bisbenzocyclobutene; BCB; BK7 glass substrates; chemical etching; organic polymer; planar slab waveguides; polymeric optical waveguides; single mode optical waveguides; straight waveguides; Costs; Etching; Glass; Optical device fabrication; Optical planar waveguides; Optical polymers; Optical waveguides; Organic chemicals; Planar waveguides; Slabs;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620940
