Title :
Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches
Author :
Afrang, Saeid ; Rezazadeh, Ghader
Author_Institution :
Dept. of Electr. Eng., Urmia Univ., Iran
Abstract :
This paper reports on the design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches. First the electromechanical design and simulation of simple cantilever and fixed-fixed ends type MEMS switches is presented, and the effect of electrostatic area and its location on the switching voltage is investigated. Then the governing equations for spring-constant of varying section cantilever and fixed-fixed end types MEMS switches is derived by energy method and Euler-Bernoulli theory. The switching voltage of mentioned constructions for MEMS switches is determined by design and simulation methods and the results of these methods are compared.
Keywords :
cantilevers; microswitches; Euler-Bernoulli theory; electromechanical design; electromechanical simulation; electrostatic area; energy method; fixed-fixed end types MEMS switch; simple cantilever; spring-constant; switching voltage; varying section cantilever; Design methodology; Electrostatics; Energy consumption; Equations; Mechanical engineering; Microswitches; Residual stresses; Springs; Structural beams; Voltage;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620956
