Title :
Study of coreless planar inductor at high operating frequency
Author :
Yunas, Jumril ; Rahman, Nuriha Abd ; Chai, Lem Tien ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron., Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
This paper presents a study of the silicon based planar inductor for high frequency transformer. The purpose of the study is to investigate the role of the coreless inductor design to increase the performance of the planar transformer. Topics such as design technique of spiral inductor and surface micromachining process technique have been also described in this paper.
Keywords :
high-frequency transformers; inductors; micromachining; Si; coreless planar inductor; high frequency transformer; high operating frequency; planar transformer; silicon based planar inductor; spiral inductor; surface micromachining; Circuits; Coils; Costs; Fabrication; Frequency; Inductance; Inductors; Silicon; Spirals; Transformer cores;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620959
