Application of barium strontium titanate thin film as distance sensor

Author

Abedin, Nur Hanani Zainal ; Muhamad Mat Salleh ; Ibrahim, Noor Baa´yah

Author_Institution

Inst. of Microeng. & Nanoelectron., Univ. Kebangsaan Malaysia, Selangor

fYear

2004

Firstpage

615

Lastpage

617

Abstract

Distance sensors are very important for anti-collision sensors in automotives. This paper reports the application of Barium Strontium Titanate Ba₁SrTiO₃ (BST) thin film as distance sensor using a bolometric method. Capacitance device with structure of Al/BST/TiO₂/RuO₂/SiO₂/Si was fabricated. The BST film was prepared using RF magnetron sputtering. The device was then illuminated with an infrared light source from an LED with a peak wavelength at 830 nm. The illumination has increased the temperature of the film, hence changed the capacitance. The change in the capacitance was detected through the voltage changed in the device. It was found that the change of the voltage was decreased with the increment of distance film to the light source

Keywords

aluminium; automotive electronics; barium compounds; bolometers; collision avoidance; distance measurement; electric sensing devices; infrared detectors; ruthenium compounds; sputtering; strontium compounds; thin film devices; titanium compounds; 830 nm; Al-(BaSr)TiO₃-TiO₂-RuO₂-SiO ₂-Si; Ba₁SrTiO₃; LED; RF magnetron sputtering; anti-collision sensor; automotive; bolometric method; capacitance device; distance sensor; ferroelectric bolometer; Automotive engineering; Barium; Binary search trees; Capacitance; Light sources; Sputtering; Strontium; Thin film sensors; Titanium compounds; Voltage; Barium strontium titanate; distance sensor; ferroelectric bolometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

0-7803-8658-2

Type

conf

DOI

10.1109/SMELEC.2004.1620961

Filename

1620961