Title :
Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer
Author :
Alabqari, Ahmad ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron., Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
This paper is presenting on the study of the electrostatic pull-in behaviors through simulation for 50g force balanced accelerometer. The simulation deals with several structures based on capacitive accelerometer type using Coventorware 2001.3. Analysis interest is to analyze the electrostatic force pull-in magnitude generated by applying DC voltage to the stator electrodes, and proofmass pull-in displacement for different configurations.
Keywords :
accelerometers; capacitive sensors; electrostatics; microsensors; stators; Coventorware 2001.3; applying DC voltage; capacitive accelerometer; electrostatic pull-in behavior; force balanced MEMS accelerometer; proofmass pull-in displacement; several structure; stator electrode; Accelerometers; Capacitance; Electrodes; Electrostatic actuators; Electrostatic analysis; Fingers; Force control; Force feedback; Micromechanical devices; Voltage;
Conference_Titel :
Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Print_ISBN :
0-7803-8658-2
DOI :
10.1109/SMELEC.2004.1620972
