Title :
Novel Method of Ion Energy and Ion Energy Distribution Function Control at the Substrate during Plasma Processing
Author :
Want, H. ; Wendt, A.E.
Author_Institution :
University of Wisconsin-Madison
Abstract :
Summary form only as given.
Keywords :
Distribution functions; Plasma chemistry; Plasma confinement; Plasma density; Plasma materials processing; Plasma simulation; Plasma waves; Programmable logic arrays; Voltage;
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5224-6
DOI :
10.1109/PLASMA.1999.829298
