Two-dimensional simulation of an electron cyclotron resonance discharge

Summary form only given, as follows. A two-dimensional three-moment simulation code was developed and performed for the study of the electron cyclotron resonance (ECR) plasma sources based on the self-consistent fluid model which determines the dynamics of the plasma as well as its interactions with the microwave. In particular, the ECR discharges can be characterized by two major parameters, one is the selection of the microwave mode, and the other is the magnetic field configuration. In this study, two different waveguide modes, i.e. TE/sub 01/ and TM/sub 01/, with the same frequency 2.45 GHz, are applied to induce the ECR discharges in the different magnetic field configurations with uniform, diverging, and mirror profiles. The input power and the background argon pressure are scanned in the range of 0.3-1.2 kW and 1-20 mTorr, respectively. In order to examine their effects on the ECR discharges, we diagnose the plasma density profile, plasma generation rate, spatial temperature distribution, and the spatial deposition of the wave power, etc. by investigating these plasma distributions, appropriate operating conditions far the ECR discharge will be suggested.