• DocumentCode
    1708114
  • Title

    A 0.25mm2 AC-biased MEMS microphone interface with 58dBA SNR

  • Author

    Ersoy, S. ; van Veldhoven, R.H.M. ; Sebastiano, Fabio ; Reimann, Klaus ; Makinwa, Kofi A. A.

  • Author_Institution
    NXP Semicond., Eindhoven, Netherlands
  • fYear
    2013
  • Firstpage
    382
  • Lastpage
    383
  • Abstract
    Capacitive MEMS microphone roadmaps are mainly driven by increasing SNR and reducing size/cost. This requires smaller microphones, ASICs with lower noise and smaller area, and cheaper packaging. Because of fundamental limitations, traditional DC-biased microphones will have difficulty following these trends. This paper proposes an AC-biasing scheme, which leads to a significant reduction in ASIC size and module packaging cost.
  • Keywords
    AC machines; DC machines; capacitance; electronics packaging; micromechanical devices; microphones; AC-biased MEMS microphone interface; AC-biasing scheme; ASIC size reduction; DC-biased microphone; SNR; capacitive MEMS microphone roadmap; module packaging cost; noise; Application specific integrated circuits; Clocks; Electromagnetic interference; Micromechanical devices; Microphones; Signal to noise ratio;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2013 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0193-6530
  • Print_ISBN
    978-1-4673-4515-6
  • Type

    conf

  • DOI
    10.1109/ISSCC.2013.6487779
  • Filename
    6487779
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1708114