Title :
A 0.25mm2 AC-biased MEMS microphone interface with 58dBA SNR
Author :
Ersoy, S. ; van Veldhoven, R.H.M. ; Sebastiano, Fabio ; Reimann, Klaus ; Makinwa, Kofi A. A.
Author_Institution :
NXP Semicond., Eindhoven, Netherlands
Abstract :
Capacitive MEMS microphone roadmaps are mainly driven by increasing SNR and reducing size/cost. This requires smaller microphones, ASICs with lower noise and smaller area, and cheaper packaging. Because of fundamental limitations, traditional DC-biased microphones will have difficulty following these trends. This paper proposes an AC-biasing scheme, which leads to a significant reduction in ASIC size and module packaging cost.
Keywords :
AC machines; DC machines; capacitance; electronics packaging; micromechanical devices; microphones; AC-biased MEMS microphone interface; AC-biasing scheme; ASIC size reduction; DC-biased microphone; SNR; capacitive MEMS microphone roadmap; module packaging cost; noise; Application specific integrated circuits; Clocks; Electromagnetic interference; Micromechanical devices; Microphones; Signal to noise ratio;
Conference_Titel :
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2013 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4673-4515-6
DOI :
10.1109/ISSCC.2013.6487779
