Title :
Two species presheath measurements in a multi-dipole plasma
Author :
Hala, A.M. ; Hershkowitz, Noah
Author_Institution :
Wisconsin Univ., Madison, WI, USA
Abstract :
Summary form only given, as follows. Emissive probe measurements of plasma presheath potential profiles were made in a DC hot filament multi-dipole plasma discharge. The measurements were done with argon, xenon and a combination of the two gases. The presheath plasma potential near a negatively biased plate was mapped in two dimensions. The inflection point method in the limit of zero emission was used. The presheath was found to be a region of constant electric field with characteristic length the order of the ion-neutral collision length. The results show contraction of the presheath in the direction perpendicular to the plate as the pressure increases (between 0.5 and 3 mtorr). Two competing processes affect the presheath. These are ionization and collisions with ionization becoming more important at lower pressures. Experimental results are compared to various presheath models.
Keywords :
argon; plasma collision processes; plasma probes; plasma sheaths; xenon; Ar; DC hot filament multi-dipole plasma discharge; Xe; collisions; constant electric field; emissive probe measurements; inflection point method; ion-neutral collision length; ionization; multi-dipole plasma; negatively biased plate; presheath plasma potential; two species presheath measurements; zero emission limit; Argon; Gases; Ionization; Plasma measurements; Plasma properties; Probes; US Department of Energy; Xenon;
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5224-6
DOI :
10.1109/PLASMA.1999.829380