Ion distribution functions in an ECR chlorine discharge

Summary form only given, as follows. We have developed an axisymmetric quasi-neutral particle simulation code, QUASI-rz, to study heating and transport of plasma in an ECR reactor configuration. All species are treated as particles. The code contains a kinetic formulation for ECR heating that includes Doppler shifts and self-consistent wave attenuation. The plasma is high density and weakly collisional, with mean free paths on the order of a few centimeters. We will present the results of simulating a chlorine-argon gas mixture with pressures on the order of a few milliTorr. Charged particles collide with the neutral gas and with other charged particles. We include ion-ion, and electron-electron scattering. In chlorine, ions can be either positively, or negatively charged. Negative ions, unlike electrons are not constrained to a single field line, and may contribute to the cross field particle flux. We present results from the simulation showing the densities of the various species. We also show the velocity distribution functions of the ions at various locations in the system. The relative importance of ion-ion and ion-neutral scattering in the presheath region will be examined.