Title :
Nitrogen influences on a laser produced TMAE plasma
Author :
Ding, G. ; Scharer, J.E. ; Kelly, K.L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
Summary form only given. TMAE is a readily ionized organic gas, tetrakis(dimethylamino)ethylene, which can be single photon ionized by a 193 nm laser, so that a large volume (hundreds of cm/sup 3/), high initial plasma density (>10/sup 13/ cm/sup -3/) plasma can be created. Additional high pressure nitrogen admixture effects in this plasma are studied by measuring planar Langmuir probe electron saturation currents: which provide more reliable electron density measurements than those from ion saturation current, because the former is not dependent on ion species but the latter is. The former is much more difficult in the experiment due to the difficulty of accurately identifying the electron saturation current: but we have got very flat curves of the electron saturation current vs. the bias voltage so that the electron saturation currents can be accurately identified. The technique of these fast probe measurements which include a detailed considerations of probe structure, probe surface cleaning, shielding, probe perturbation, frequency response. Temporal and spatial resolutions, dummy probe corrections as well as noise analysis will be shown. The electron densities and temperatures vs. time at different TMAE pressures, nitrogen pressures and laser powers will be present.
Keywords :
Langmuir probes; organic compounds; plasma density; plasma production by laser; plasma temperature; dummy probe corrections; electron density; electron density measurements; electron saturation current; electron temperature; frequency response; high pressure N/sub 2/ admixture effects; ion saturation current; large volume high initial plasma density; laser produced plasma; noise analysis; planar Langmuir probe electron saturation currents; probe perturbation; probe surface cleaning; readily ionized organic gas; single photon ionization; spatial resolutions; temporal resolutions; tetrakis(dimethylamino)ethylene; Current measurement; Density measurement; Electrons; Gas lasers; Nitrogen; Plasma density; Plasma measurements; Pressure measurement; Probes; Voltage;
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5224-6
DOI :
10.1109/PLASMA.1999.829484