Investigation of unmagnetized plasma heating in a low pressure microwave discharge

Author

Perrin, M. ; Grotjohn, T. ; Asmussen, J.

Author_Institution

Michigan State Univ., East Lansing, MI, USA

fYear

1999

Firstpage

203

Abstract

Summary form only given. In this investigation an argon plasma is excited in a cylindrical cavity applicator with inner diameter of 17.78 cm. Power is coupled into the cavity with a variable length (0-6 cm) coaxial probe antenna placed in the center of a variable height (5-15 cm) sliding short. The power input is 100-400 W at a microwave frequency of 2.45 GHz. The discharge pressure is varied from 1-60 mTorr and the argon flow rates range from 250 seem. The discharge chamber is 12.5 cm in diameter and 8 cm tall. No permanent or electro-magnets are used in this experiment.

Keywords

argon; high-frequency discharges; plasma heating; 1 to 60 mtorr; 100 to 400 W; 2.45 GHz; Ar; Ar plasma; cylindrical cavity applicator; discharge pressure; low pressure microwave discharge; unmagnetized plasma heating; variable height sliding short; variable length coaxial probe antenna; Applicators; Argon; Electromagnetic heating; Electromagnetic measurements; Electrons; Plasma measurements; Plasma properties; Plasma simulation; Plasma temperature; Probes;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on

Conference_Location

Monterey, CA, USA

ISSN

0730-9244

Print_ISBN

0-7803-5224-6

Type

conf

DOI

10.1109/PLASMA.1999.829492

Filename

829492