DocumentCode
1712520
Title
A mechanical approach to overcome RF MEMS switch stiction problem
Author
Mercado, Lei L. ; Shun-Meen Koo ; Lee, Tien-Yu Tom ; Liu, Ltanjun
Author_Institution
Motorola lnc.
fYear
2003
Firstpage
377
Lastpage
384
Keywords
Cellular phones; Communication switching; Contact resistance; Electrodes; Insertion loss; Metal-insulator structures; Microswitches; Radiofrequency microelectromechanical systems; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
ISSN
0569-5503
Print_ISBN
0-7803-7791-5
Type
conf
DOI
10.1109/ECTC.2003.1216305
Filename
1216305
Link To Document