Title :
An investigation of the material and process parameters for thin-film MCM-D and MCM-L technologies up to 100GHz
Author :
Grzyb, Janusz ; Ruiz, Ivan ; Cottet, Didier ; Troster, Gerhard
Author_Institution :
ETH Zurich
Keywords :
Dielectric constant; Dielectric losses; Dielectric materials; Dielectric measurements; Dielectric substrates; Equations; Frequency; Microstrip; Permittivity measurement; Transistors;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216322
