Title :
Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects
Author :
Den Toonder, Jaap ; Van Dijken, Auke ; Gonda, Viktor ; Beijer, Johan ; Zhang, Kouchi ; Ernst, Leo
Author_Institution :
Phillips Research Laboratories
Keywords :
Conducting materials; Dielectric materials; Elasticity; Integrated circuit interconnections; Polymer films; Semiconductor films; Semiconductor materials; Silicon compounds; Temperature distribution; Viscosity;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216361
