DocumentCode
1713891
Title
Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects
Author
Den Toonder, Jaap ; Van Dijken, Auke ; Gonda, Viktor ; Beijer, Johan ; Zhang, Kouchi ; Ernst, Leo
Author_Institution
Phillips Research Laboratories
fYear
2003
Firstpage
708
Lastpage
713
Keywords
Conducting materials; Dielectric materials; Elasticity; Integrated circuit interconnections; Polymer films; Semiconductor films; Semiconductor materials; Silicon compounds; Temperature distribution; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
ISSN
0569-5503
Print_ISBN
0-7803-7791-5
Type
conf
DOI
10.1109/ECTC.2003.1216361
Filename
1216361
Link To Document