Simulation of magnetron sputter with three-dimensional magnetic field

Summary form only given. Various properties of planar magnetron system are obtained with a kinetic code (Verboncoeur et al., 1995) in a magnetic field in two dimension and three dimension. We simulate the magnetron system to obtain various plasma characteristics and erosion profiles of target material with these magnetic fields. The steady-state properties are calculated from the scaling formulas to save computing time. Various geometries and magnetic fields are used to optimize the erosion profiles and plasma characteristics. The calculated erosion profile is compared with experimental one. The maximum erosion point of calculation coincides well with the experimental one. The discrepancy of erosion width between calculation and experiment originates from the changes of electric field and magnetic field in the eroded target region. This is verified from the simulation with a pre-eroded target geometry.