High-Q MEMS-tunable W-band bandstop resonators

High quality factor W band MEMS-tunable evanescent-mode bandstop resonators are presented for the first time. The precision, tolerances, and small feature capability of silicon microfabrication techniques enable these resonators to be the highest frequency tunable evanescent-mode cavities shown to date. Their MEMS tuning technology requires very low power to operate, and the entire resonator-tuner structure is made of silicon to enable compatibility with integrated circuit manufacturing processes. A measured tuning range of 75.8 GHz to 82.3 GHz with quality factors of 414 to 448 were observed with a tuning voltage of 70 Volts. Such resonators will be important for tunable W band filters as lower frequencies become saturated and W band applications become more common.