Power-efficient voltage tunable RF integrated magnetoelectric inductors with FeGaB/Al2O3 multilayer films

Author

Yuan Gao ; Zare, Salman ; Onabajo, Marvin ; Ming Li ; Ziyao Zhou ; Tianxiang Nan ; Xi Yang ; Ming Liu ; Mahalingam, Krishnamurthy ; Howe, Bruce M. ; Jones, John G. ; Brown, Gabriel J. ; Sun, Nian X.

Author_Institution

Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA

fYear

2014

fDate

1-6 June 2014

Firstpage

1

Lastpage

4

Abstract

This work reports new integrated GHz magnetic inductors based on solenoid structures with FeGaB/Al₂O₃ multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show excellent high-frequency performance with a wide operation frequency range of DC-2.5GHz, in which the inductance of the integrated magnetic inductors show >100% enhancement compared with that of the same size air core inductor. Voltage tunable magnetoelectric inductors were fabricated with MEMS processing by putting these inductors on 0.5mm thick ferroelectric (011) cut lead magnesium niobate - lead titanate PMN-PT slab, which showed a voltage tunable inductance of >100%. These novel voltage tunable GHz inductors with giant tunable inductance show great promise for applications in radio frequency integrated circuits.

Keywords

aluminium compounds; ferroelectric devices; ferroelectric materials; iron compounds; magnetic cores; magnetic multilayers; magnetic thin films; magnetoelectronics; microfabrication; micromechanical devices; solenoids; thin film inductors; FeGaB-Al₂O₃; MEMS processing; air core inductor; ferroelectric cut lead magnesium niobate-lead titanate PMN-PT slab; frequency 2.5 GHz; giant tunable inductance; integrated GHz magnetic inductor; multilayer film; power-efficient voltage tunable RF integrated magnetoelectric inductor; radiofrequency integrated circuit; size 0.5 mm; solenoid structure; voltage tunable GHz inductor; Inductance; Inductors; Magnetic cores; Magnetic films; Radio frequency; Soft magnetic materials; FeGaB; Integrated magnetic inductor; RF application; solenoid; voltage tunable inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium (IMS), 2014 IEEE MTT-S International

Conference_Location

Tampa, FL

Type

conf

DOI

10.1109/MWSYM.2014.6848587

Filename

6848587