Title :
New high-precision circuits for on-chip capacitor ratio testing and sensor readout
Author :
Wang, Bo ; Kajita, Tetsuya ; Sun, Tao ; Temes, Gabor
Author_Institution :
Dept. of Electr. & Comput. Eng., Oregon State Univ., Corvallis, OR, USA
Abstract :
This paper presents novel CMOS switched-capacitor circuits for high-accuracy on-chip capacitor ratio testing and sensor readout. Using sigma-delta and correlated-double-sampling (CDS) techniques, these circuits provide accurate digitized capacitive ratio readout. Simulation results show that the resolution can be as fine as 100 aF for 10 pF tested capacitors. One of the circuits was realized in fully integrated form. It provided readings with a standard deviation of less than 20 aF (2 ppm) for 10 pF capacitors
Keywords :
CMOS integrated circuits; sigma-delta modulation; switched capacitor networks; 10 pF; CMOS switched-capacitor circuits; correlated-double-sampling techniques; digitized capacitive ratio readout; fully integrated form; high-precision circuits; on-chip capacitor ratio testing; sensor readout; sigma-delta techniques; standard deviation; Capacitance measurement; Capacitive sensors; Circuit simulation; Circuit testing; Clocks; Delta-sigma modulation; Feedback; Parasitic capacitance; Switched capacitor circuits; Voltage;
Conference_Titel :
Circuits and Systems, 1998. ISCAS '98. Proceedings of the 1998 IEEE International Symposium on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-4455-3
DOI :
10.1109/ISCAS.1998.704567
