DocumentCode
1716505
Title
Low dark current SWIR photodiode with InGaAs/GaAsSb Type II quantum wells grown on InP substrate
Author
Inada, H. ; Miura, K. ; Nagai, Y. ; Tsubokura, M. ; Moto, A. ; Iguchi, Y. ; Kawamura, Y.
Author_Institution
Transm. Devices R&D Labs., Sumitomo Electr. Ind., Ltd., Osaka
fYear
2009
Firstpage
149
Lastpage
152
Abstract
For sensing short wavelength infrared (SWIR) region (1.0-2.5 mum), photodiodes with In0.53Ga0.47As/GaAs0.5Sb0.5 type II quantum well structure grown on InP substrate by solid source molecular beam epitaxy (MBE), were successfully fabricated. Low dark current was obtained by improving GaAsSb crystalline quality.
Keywords
III-V semiconductors; dark conductivity; gallium arsenide; gallium compounds; indium compounds; molecular beam epitaxial growth; photodiodes; semiconductor quantum wells; In0.53Ga0.47As-GaAs0.5Sb0.5; MBE; SWIR photodiode; dark current; infrared wavelength; solid source molecular beam epitaxy; type II quantum well structure; Absorption; Buffer layers; Dark current; Indium gallium arsenide; Indium phosphide; Molecular beam epitaxial growth; Photodiodes; Substrates; Technological innovation; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide & Related Materials, 2009. IPRM '09. IEEE International Conference on
Conference_Location
Newport Beach, CA
ISSN
1092-8669
Print_ISBN
978-1-4244-3432-9
Electronic_ISBN
1092-8669
Type
conf
DOI
10.1109/ICIPRM.2009.5012464
Filename
5012464
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