Title :
Deep etching and rabbit-ear-free regrowths for quantum cascade lasers
Author :
Cheng, Liwei ; Godbole, Mohit ; Choa, Fow-Sen ; Janssen, Douglas ; Astri, Robert ; Fan, Jenyu
Author_Institution :
Dept. of CSEE, Univ. of Maryland, Baltimore, MD
Abstract :
Extensive deep etchings on quantum-cascade-laser (QCL) along both [011] and [01macr1] mesa orientations were presented and discussed. We experimentally study the effect of etched mesa profiles with various mask overhang lengths on buried-heterostructure QCL regrowth grown by MOCVD. We demonstrate that successful regrowths can be reproducibly obtained with a ratio of mesa height to overhang length between 2.5 and 3.0.
Keywords :
MOCVD; etching; masks; quantum cascade lasers; MOCVD; buried-heterostructure regrowth; etched mesa profiles; extensive deep etchings; mask; mesa orientations; quantum-cascade-laser; rabbit-ear-free regrowths; Chemicals; Cities and towns; Indium phosphide; MOCVD; Power generation; Quantum cascade lasers; Temperature sensors; Thermal conductivity; Thermal management; Wet etching;
Conference_Titel :
Indium Phosphide & Related Materials, 2009. IPRM '09. IEEE International Conference on
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-3432-9
Electronic_ISBN :
1092-8669
DOI :
10.1109/ICIPRM.2009.5012487
