A new system-on-a-chip (SOC) technology high Q post passivation inductors

Author

Lin, M.S. ; Ling Chen ; Lee, J.Y. ; Wan, K.H. ; Chen, H.M. ; Chou, Kuo-Yu ; Hsiao, Roger ; Lin, Eric

Author_Institution

Megic Corp.

fYear

2003

Firstpage

1503

Lastpage

1509

Keywords

Circuits; Costs; Gallium arsenide; Inductors; Manufacturing processes; Passivation; Polyimides; Radio frequency; Silicon; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2003. Proceedings. 53rd

ISSN

0569-5503

Print_ISBN

0-7803-7791-5

Type

DOI

10.1109/ECTC.2003.1216495

Filename

1216495

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