Title :
A design study for thermal control of a CVD reactor for YBCO
Author :
Gallivan, Martha A. ; Goodwin, David G. ; Murray, Richard M.
Author_Institution :
Div. of Eng. & Appl. Sci., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Active thermal control of a reactor for YBa2Cu3 O7-x chemical vapor deposition is studied using a nonlinear heat transfer model validated by preliminary component testing. LQR and LQE methods are applied to the linearized model for observer-based control. Convergence rates of the controller and observer are indicated by closed-loop eigenvalues, and the disturbance rejection is assessed with H2 and H∞ norms. Design trade-offs are quantified with these measures by varying model parameters. Maximum errors in control and estimation for a nominal design case are both 21 K, and the longest time scales are 45 seconds and 10 seconds for the controller and observer, respectively
Keywords :
chemical vapour deposition; closed loop systems; eigenvalues and eigenfunctions; heat transfer; linear quadratic control; observers; process control; thermal variables control; 10 sec; 45 sec; H∞ norm; H2 norm; YBCO; YBaCuO; chemical vapor deposition; closed-loop systems; convergence rates; disturbance rejection; eigenvalues; linearized model; nonlinear heat transfer; observer; thermal control; Chemical vapor deposition; Heat transfer; Inductors; MOCVD; Silicon carbide; Substrates; Superconducting filters; Temperature control; Temperature measurement; Yttrium barium copper oxide;
Conference_Titel :
Control Applications, 1998. Proceedings of the 1998 IEEE International Conference on
Conference_Location :
Trieste
Print_ISBN :
0-7803-4104-X
DOI :
10.1109/CCA.1998.721648
