Title :
Integration and high-frequency characterization of PWB-compatible pure barium titanate films synthesized by modified hydrothermal techniques (< 100°C)
Author :
Balaraman, D. ; Raj, P. Markondeya ; Abothu, Issac Robm ; Bhattacharya, S. ; Dalmia, S. ; Wan, Lixi ; Swaininathan, M. ; Tummala, Rao
Author_Institution :
Georgia Institute of Technology
Keywords :
Barium; Capacitance; Capacitors; Dielectric constant; Dielectric thin films; Ferroelectric films; Ferroelectric materials; Frequency; Residual stresses; Titanium compounds;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216498
