Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure

Author

Yoon, Yong-Kyu ; Allen, Mark G. ; Hunt, Andrew T.

Author_Institution

Georgia Institute of Technology

fYear

2003

Firstpage

1534

Lastpage

1540

Keywords

Barium; Binary search trees; Capacitance; Capacitors; Electrodes; Fabrication; Ferroelectric materials; Strontium; Substrates; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2003. Proceedings. 53rd

ISSN

0569-5503

Print_ISBN

0-7803-7791-5

Type

DOI

10.1109/ECTC.2003.1216500

Filename

1216500

Link To Document