Title :
Using EWOD (electrowetting-on-dielectric) actuation in a micro conveyor system
Author :
Moon, Ilju ; Kim, Joonwon
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Abstract :
The paper reports the development of a novel application of EWOD (electrowetting-on-dielectric) actuation in a micro conveyor system. Using the movement of liquid droplets by EWOD actuation as a part of active mechanical component moving, a simple and effective mechanism for the micro conveyor system can be realized for the first time. The concept, fabrication and test of the initial devices are reported and various possible applications are discussed.
Keywords :
drops; microactuators; micromachining; active mechanical component moving; electrowetting-on-dielectric actuation; micro conveyor system; micro transportation systems; Contacts; Control systems; Dielectric substrates; Electrodes; Fabrication; Glass; Silicon; Testing; Transportation; Voltage control;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496378
