Title :
Multifunctional tool for expanding AFM-based applications
Author :
Deladi, S. ; Tas, N.R. ; Krijnen, G.J.M. ; Elwenspoek, M.C.
Author_Institution :
Transducers Sci. & Technol. Dept., Twente Univ., Enschede, Netherlands
Abstract :
A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).
Keywords :
atomic force microscopy; electrochemistry; lithography; micromachining; micromechanical devices; physical chemistry; probes; tribology; AFM-based applications; AFM-probe; atomic force microscopy; cantilevers; design; electrochemical metal deposition; electrochemistry; fabrication; fountain-pen lithography; multifunctional tool; physical chemistry; surface modification; tribology; wear characterization; Atomic force microscopy; Atomic layer deposition; Character generation; Chemicals; Glass; Instruments; Lithography; Probes; Surface topography; Transducers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496383
