Title :
Electromagnetically actuated ball valve micropumps
Author :
Yamahata, Christophe ; Lacharme, Frédéric ; Matter, Jan ; Schnydrig, Silvan ; Burri, Yves ; Gijs, Martin A M
Author_Institution :
Inst. of Microelectron. & Microsystems, Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
We present two types of oscillating diaphragm micropumps configured with passive ball valves and using electromagnetic actuation. One type is made out of poly(methyl methacrylate) (PMMA), while the other one is made out of borosilicate glass. Both were produced using the powder blasting microfabrication method. The pumping resonant frequency was measured to be within the range of 20-30 Hz for both prototypes. At resonance, a maximum backpressure of 280 mbar and a maximum water flow rate of about 5 ml/min were obtained. The experimental results can be well described by a simple hydrodynamic model of the system.
Keywords :
borosilicate glasses; diaphragms; electromagnetic actuators; hydrodynamics; microfluidics; micromachining; micropumps; microvalves; polymers; resonance; 20 to 30 Hz; 280 mbar; PMMA; ball valve micropumps; borosilicate glass; electromagnetically actuated micropumps; hydrodynamic damped oscillator model; magnetic actuation; maximum back-pressure; maximum water flow rate; oscillating diaphragm micropumps; passive ball valves; polymethyl methacrylate; powder blasting microfabrication method; pumping resonant frequency; reciprocating micropumps; stainless steel balls; Electromagnetic measurements; Frequency measurement; Glass; Hydrodynamics; Micropumps; Powders; Prototypes; Resonance; Resonant frequency; Valves;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496391
