Title :
RF MEMS components using CMOS technology
Author :
Ozgur, M. ; Zaghloul, M.E.
Author_Institution :
MEMS Exchange/CNRI, Reston, VA, USA
Abstract :
Recently microelectromechanical systems (MEMS) devices have become an important technology that is used in many applications. We describe post-processing steps of CMOS technology to implement a MEMS structure suitable for RF systems. We describe CMOS-based monolithic MEMS structures suitable for realizing passive RF components operating at frequencies of up to 60 GHz. Examples of RF MEMS components - inductors, switches and tunable capacitors, and coplanar transmission lines - realized in this technology are given.
Keywords :
CMOS analogue integrated circuits; capacitors; coplanar transmission lines; inductors; micromechanical devices; microwave antennas; microwave switches; millimetre wave devices; CMOS technology; RF MEMS components; antennas; coplanar transmission lines; inductors; microelectromechanical systems; monolithic MEMS; post-processing; switches; tunable capacitors; CMOS technology; Integrated circuit technology; Micromachining; Micromechanical devices; Polyimides; Radio frequency; Radiofrequency microelectromechanical systems; Resists; Silicon; Substrates;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2001. IEEE
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7070-8
DOI :
10.1109/APS.2001.960187
