DocumentCode
1717826
Title
RF MEMS components using CMOS technology
Author
Ozgur, M. ; Zaghloul, M.E.
Author_Institution
MEMS Exchange/CNRI, Reston, VA, USA
Volume
3
fYear
2001
Firstpage
678
Abstract
Recently microelectromechanical systems (MEMS) devices have become an important technology that is used in many applications. We describe post-processing steps of CMOS technology to implement a MEMS structure suitable for RF systems. We describe CMOS-based monolithic MEMS structures suitable for realizing passive RF components operating at frequencies of up to 60 GHz. Examples of RF MEMS components - inductors, switches and tunable capacitors, and coplanar transmission lines - realized in this technology are given.
Keywords
CMOS analogue integrated circuits; capacitors; coplanar transmission lines; inductors; micromechanical devices; microwave antennas; microwave switches; millimetre wave devices; CMOS technology; RF MEMS components; antennas; coplanar transmission lines; inductors; microelectromechanical systems; monolithic MEMS; post-processing; switches; tunable capacitors; CMOS technology; Integrated circuit technology; Micromachining; Micromechanical devices; Polyimides; Radio frequency; Radiofrequency microelectromechanical systems; Resists; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation Society International Symposium, 2001. IEEE
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7070-8
Type
conf
DOI
10.1109/APS.2001.960187
Filename
960187
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