Title :
Hydrogen Plasma Diffusion Treatment of Layers Prepared by Plasma Nitridation
Author :
Hruby, V. ; Kadlec, J. ; Stodola, J.
Author_Institution :
Military Academy
Abstract :
Summary form only as given.
Keywords :
Annealing; Plasma materials processing; Plasma measurements; Plasma properties; Production; Rough surfaces; Surface resistance; Surface roughness; Thickness measurement;
Conference_Titel :
Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-5224-6
DOI :
10.1109/PLASMA.1999.829730
