• DocumentCode
    1717932
  • Title

    Hydrogen Plasma Diffusion Treatment of Layers Prepared by Plasma Nitridation

  • Author

    Hruby, V. ; Kadlec, J. ; Stodola, J.

  • Author_Institution
    Military Academy
  • fYear
    1999
  • Firstpage
    330
  • Lastpage
    330
  • Abstract
    Summary form only as given.
  • Keywords
    Annealing; Plasma materials processing; Plasma measurements; Plasma properties; Production; Rough surfaces; Surface resistance; Surface roughness; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1999. ICOPS '99. IEEE Conference Record - Abstracts. 1999 IEEE International Conference on
  • Conference_Location
    Monterey, CA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-5224-6
  • Type

    conf

  • DOI
    10.1109/PLASMA.1999.829730
  • Filename
    829730
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1717932