Feedback control of high-intensity silicon ultrasonic surgical actuator

For the first time, we demonstrate feedback control of a high-intensity silicon ultrasonic horn actuator in the presence of time-varying contact forces, by using strain feedback from integrated piezoresistive strain gauges. With feedback control, the ultrasonic actuator has maintained its resonance under forces as high as 1.2 N on the tip of the actuator. This robust actuation enables the silicon ultrasonic horn to maintain its most effective actuation when its environment and loading conditions are changing due to ultrasonic effects such as pumping, cutting, and atomizing.