Semiconductivity of pyrolyzed polymer for MEMS application

Author

Konishi, S. ; Nagae, H. ; Sagawa, T. ; Naka, K. ; Yoshioka, K.

Author_Institution

Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kyoto, Japan

Volume

1

fYear

2005

Firstpage

271

Abstract

The paper deals with a pyrolyzed polymer as a kind of carbon material obtained by the pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O₂. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer MEMS structures. Polymer MEMS structures can be transformed into "pyrolyzed polymer MEMS" for various applications. This work focuses on the semiconductivity of a pyrolyzed polymer derived from popular polymer materials in MEMS. A measurement of the Hall effect provides information on the semiconductivity of pyrolyzed polymer. A diode is designed and demonstrated as the first step in the application of the semiconductive pyrolyzed polymer.

Keywords

Hall effect; micromachining; micromechanical devices; organic semiconductors; polymers; pyrolysis; semiconductor diodes; Hall effect; diode; micromachining; polymer pyrolysis; pyrolyzed polymer MEMS structures; semiconductive pyrolyzed polymer; semiconductivity; Educational institutions; Electrodes; Micromachining; Micromechanical devices; Organic materials; Polyimides; Polymer films; Resists; Semiconductivity; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496409

Filename

1496409