Title :
Semiconductivity of pyrolyzed polymer for MEMS application
Author :
Konishi, S. ; Nagae, H. ; Sagawa, T. ; Naka, K. ; Yoshioka, K.
Author_Institution :
Dept. of Micro Syst. Technol., Ritsumeikan Univ., Kyoto, Japan
Abstract :
The paper deals with a pyrolyzed polymer as a kind of carbon material obtained by the pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O2. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer MEMS structures. Polymer MEMS structures can be transformed into "pyrolyzed polymer MEMS" for various applications. This work focuses on the semiconductivity of a pyrolyzed polymer derived from popular polymer materials in MEMS. A measurement of the Hall effect provides information on the semiconductivity of pyrolyzed polymer. A diode is designed and demonstrated as the first step in the application of the semiconductive pyrolyzed polymer.
Keywords :
Hall effect; micromachining; micromechanical devices; organic semiconductors; polymers; pyrolysis; semiconductor diodes; Hall effect; diode; micromachining; polymer pyrolysis; pyrolyzed polymer MEMS structures; semiconductive pyrolyzed polymer; semiconductivity; Educational institutions; Electrodes; Micromachining; Micromechanical devices; Organic materials; Polyimides; Polymer films; Resists; Semiconductivity; Semiconductor materials;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496409
