Title :
Design and implementation of an integrated floating-gate electrostatic power micro-generator
Author :
Ma, Wei ; Rufe, Libor ; Zohar, Yitshak ; Wong, Man
Author_Institution :
Dept. of Mech Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.
Keywords :
CMOS integrated circuits; electric generators; electroplating; electrostatic devices; integrated circuit design; integrated circuit modelling; micromachining; micromechanical resonators; semiconductor device models; small electric machines; CMOS floating-gate process; electromechanical resonator; energy conversion; energy generation; integrated floating-gate electrostatic power micro-generator; linear model; nonlinear model; photo-resist molded electroplating process; single-wafer power micro-generator; Assembly; Capacitors; Electrets; Electrodes; Electrostatics; Nonvolatile memory; Power generation; Power system modeling; Semiconductor device modeling; Vibrations;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496416
