DocumentCode
1718454
Title
A micro direct methanol fuel cell using PDMS assembly technology
Author
Jiang, Yingqi ; Wang, Xiaohong ; Xie, Kewen ; Qiu, Xinping ; Zhong, Lingyan ; Liu, Litian
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Volume
1
fYear
2005
Firstpage
303
Abstract
This paper presents the fabrication of a micro direct methanol fuel cell, featured by MEMS technology and using polydimethylsiloxane (PDMS) as the package material. The detailed fabrication processes, including an original set of assembly steps, are reported. The testing results show that the open circuit potential of the prototype with the active area of 8.6mm × 8.6mm is 0.5V, and the maximum power density is 3.86mW/cm2 using 1M methanol feed at room temperature. The PDMS package has prevented the fuel cell from any leakage during the daylong test, demonstrating that MEMS fabrication with the assistance of PDMS can be a promising way for the developing of the micro direct methanol fuel cell (μDMFC).
Keywords
electric power generation; fuel cells; micromechanical devices; MEMS technology; PDMS assembly technology; assembly; fabrication processes; methanol feed; micro direct methanol fuel cell; open circuit potential; package material; polydimethylsiloxane; Assembly; Circuit testing; Fabrication; Feeds; Fuel cells; Methanol; Micromechanical devices; Packaging; Prototypes; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1496417
Filename
1496417
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