Title :
Advanced equipment control (AEC) using knowledge management concept in semiconductor equipment
Author :
Wang, Jong C. ; Huang, Min-Liang
Author_Institution :
Yuan-Ze University
Keywords :
Algorithm design and analysis; Control systems; Cost function; Databases; Etching; Hidden Markov models; Knowledge engineering; Knowledge management; Maintenance engineering; Production;
Conference_Titel :
Electronic Components and Technology Conference, 2003. Proceedings. 53rd
Print_ISBN :
0-7803-7791-5
DOI :
10.1109/ECTC.2003.1216555
