• DocumentCode
    1718754
  • Title

    Advanced equipment control (AEC) using knowledge management concept in semiconductor equipment

  • Author

    Wang, Jong C. ; Huang, Min-Liang

  • Author_Institution
    Yuan-Ze University
  • fYear
    2003
  • Firstpage
    1847
  • Lastpage
    1849
  • Keywords
    Algorithm design and analysis; Control systems; Cost function; Databases; Etching; Hidden Markov models; Knowledge engineering; Knowledge management; Maintenance engineering; Production;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2003. Proceedings. 53rd
  • ISSN
    0569-5503
  • Print_ISBN
    0-7803-7791-5
  • Type

    conf

  • DOI
    10.1109/ECTC.2003.1216555
  • Filename
    1216555
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1718754