• DocumentCode
    1718855
  • Title

    Application of flowing thermal lens to flow sensors for microchemical chips

  • Author

    Kikutani, Yoshikuni ; Morishima, Keisuke ; Tokeshi, Manabu ; Yamaguchi, Jun ; Fukuzawa, Takashi ; Hattori, Akihiko ; Yoshida, Yoshikazu ; Kitaoka, Mitsuo ; Kitamori, Takehiko

  • Author_Institution
    Res. Assoc. of Micro Chem. Process Technol., Japan
  • Volume
    1
  • fYear
    2005
  • Firstpage
    380
  • Abstract
    A flowing thermal lens microflow velocimeter, in which a photothermally produced local refractive index change (a thermal lens) was used as a tracer, was developed for microchemical chips made of glass. A laser pulse was focused with a microlens on a liquid flow inside a microchannel, and a thermal lens was produced. The thermal lens drifted downstream and was detected using another beam. The velocity was calculated from the time required for the thermal lens to travel between the two points. The microflow velocimeters enabled non-contact measurement with only slight disturbance to the microfluid possible and were suitable for microchemical systems.
  • Keywords
    flow measurement; flowmeters; laser beam applications; microsensors; optical sensors; thermal lensing; velocimeters; flow sensors; flowing thermal lens; glass microchemical chips; microchannel; microflow velocimeter; noncontact measurement; photothermally produced local refractive index change; thermal lens; Fluid flow; Glass; Laser beams; Lenses; Microchannel; Microoptics; Optical pulses; Refractive index; Thermal lensing; Thermal sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1496435
  • Filename
    1496435