Title :
Application of flowing thermal lens to flow sensors for microchemical chips
Author :
Kikutani, Yoshikuni ; Morishima, Keisuke ; Tokeshi, Manabu ; Yamaguchi, Jun ; Fukuzawa, Takashi ; Hattori, Akihiko ; Yoshida, Yoshikazu ; Kitaoka, Mitsuo ; Kitamori, Takehiko
Author_Institution :
Res. Assoc. of Micro Chem. Process Technol., Japan
Abstract :
A flowing thermal lens microflow velocimeter, in which a photothermally produced local refractive index change (a thermal lens) was used as a tracer, was developed for microchemical chips made of glass. A laser pulse was focused with a microlens on a liquid flow inside a microchannel, and a thermal lens was produced. The thermal lens drifted downstream and was detected using another beam. The velocity was calculated from the time required for the thermal lens to travel between the two points. The microflow velocimeters enabled non-contact measurement with only slight disturbance to the microfluid possible and were suitable for microchemical systems.
Keywords :
flow measurement; flowmeters; laser beam applications; microsensors; optical sensors; thermal lensing; velocimeters; flow sensors; flowing thermal lens; glass microchemical chips; microchannel; microflow velocimeter; noncontact measurement; photothermally produced local refractive index change; thermal lens; Fluid flow; Glass; Laser beams; Lenses; Microchannel; Microoptics; Optical pulses; Refractive index; Thermal lensing; Thermal sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496435