DocumentCode
171947
Title
PDMS membranes with 2D PhC for LEDs far-field pattern modification
Author
Suslik, L. ; Pudis, D. ; Gaso, P. ; Jandura, D. ; Nolte, R. ; Hronec, Pavol ; Schaaf, P. ; Kovac, J. ; Lettrichova, Ivana ; Berezina, Sofia
Author_Institution
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
fYear
2014
fDate
19-20 May 2014
Firstpage
670
Lastpage
673
Abstract
In this paper we present new imprinting process for fabrication of PhC structures on surface of thin PDMS membranes. We used interference lithography in combination with imprinting technique. 2D PhC surface relief structures of period 495 nm were patterned in thin PDMS membranes with depth up to 100 nm. Patterned PDMS membranes placed on different optoelectronic device surface could modify the final optical properties.
Keywords
integrated optics; integrated optoelectronics; light emitting diodes; membranes; optical fabrication; optical polymers; photolithography; photonic crystals; 2D PhC surface relief structures; LED; PDMS membranes; far-field pattern modification; imprinting technique; interference lithography; optoelectronic device surface; Light emitting diodes; Photonics; Polymers; Substrates; Surface treatment; interference lithography; light emitting diode; photonic crystal structure; polydimethylsiloxane;
fLanguage
English
Publisher
ieee
Conference_Titel
ELEKTRO, 2014
Conference_Location
Rajecke Teplice
Print_ISBN
978-1-4799-3720-2
Type
conf
DOI
10.1109/ELEKTRO.2014.6848985
Filename
6848985
Link To Document