Title :
Multi-layer semi-lumped filters on MCM-D
Author :
ZOU, Bin ; Lin, Fujiang
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
fDate :
11/1/1999 12:00:00 AM
Abstract :
Multi-layer semi-lumped filters operating at 1.9 GHz are designed and implemented on MCM-D (multi-chip module-D) technology. Both high-resistivity silicon and ceramic substrates are used. The structure consists of only coplanar waveguide and capacitors. Inductors are purposely avoided with respect of their generally low Q factor. Comparison between silicon and ceramic, measured and simulated performances are made. The filter´s insertion loss of 1.3 dB is achieved at 1.9 GHz on a ceramic substrate. The filter is designed for the study of system integration so that no external discrete filter is needed in RF-MCM applications
Keywords :
UHF filters; UHF integrated circuits; coplanar waveguide components; multichip modules; passive filters; 1.3 dB; 1.9 GHz; CPW; MCM-D technology; RF-MCM applications; Si; capacitors; ceramic substrates; coplanar waveguide; high-resistivity Si substrates; insertion loss; multi-chip module; multi-layer semi-lumped filters; Capacitors; Ceramics; Coplanar waveguides; Electromagnetic coupling; Electromagnetic waveguides; Filters; Inductors; Loss measurement; Radio frequency; Silicon;
Conference_Titel :
Microwave Conference, 1999 Asia Pacific
Print_ISBN :
0-7803-5761-2
DOI :
10.1109/APMC.1999.829813
