Vacuum packaged single crystal silicon gyroscope with sub mdeg/s/√Hz resolution

The paper describes two models of vacuum packaged single crystal silicon gyroscope. A design rule for low noise gyroscopes is suggested, and a lateral vibrating gyroscope was fabricated through a metal interlaid SiOG technology. High aspect ratio (20:1) silicon structures were fabricated without footing damage. An easy method for the electric connection of feed through holes that are 150 μm in diameter is suggested for a vacuum package of SiOG structure. A comb model gyroscope exhibits a noise floor of 0.4 mdeg/s/√Hz, and a bias stability of 4.7 mdeg/s (17 deg/hour), where the scale factor is 68.5 mV/deg/s with 0.6% linearity error for the range of 200 deg/s. A parallel plate model exhibits a noise floor of 1.6 mdeg/s/√Hz, and a bias stability of 33.9 mdeg/s (122 deg/hour), where the scale factor is 68.5 mV/deg/s with 3.8% linearity error for the range of 200 deg/s.