Title :
Numerical simulation of force-balance MEMS comb accelerometers
Author :
Chen, Min ; Chen, Hao ; Wang, Jinlin ; Xu, Limei
Author_Institution :
Inst. of Astronaut. & Aeronaut., Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
This paper presents system-level modeling and simulation of force-balance MEMS comb accelerometers. The work focuses on the theoretical principles of the sense element and the interface electronics at first. Based on that, the parametric model of the sense element is established in this paper, and the simulation results of this model match well with the theoretical results, which can prove we can use the parametric model of the sense element to establish the system-level model of force-balance MEMS comb accelerometers. The system-level model of force-balance MEMS comb accelerometers including the parametric model of the sense element and the interface electronics is established in MATLAB. The simulation results show that the designed force-balance comb accelerometer has high sensitivity, wide range, low nonlinear distortion and wide bandwidth.
Keywords :
accelerometers; micromechanical devices; nonlinear distortion; numerical analysis; MATLAB; force-balance MEMS comb accelerometers; interface electronics; nonlinear distortion; numerical simulation; parametric model; sense element; system-level model; Acceleration; Accelerometers; Analytical models; Capacitance; Mathematical model; Micromechanical devices; Numerical models;
Conference_Titel :
Robotics and Biomimetics (ROBIO), 2011 IEEE International Conference on
Conference_Location :
Karon Beach, Phuket
Print_ISBN :
978-1-4577-2136-6
DOI :
10.1109/ROBIO.2011.6181451
