Numerical simulation of force-balance MEMS comb accelerometers

This paper presents system-level modeling and simulation of force-balance MEMS comb accelerometers. The work focuses on the theoretical principles of the sense element and the interface electronics at first. Based on that, the parametric model of the sense element is established in this paper, and the simulation results of this model match well with the theoretical results, which can prove we can use the parametric model of the sense element to establish the system-level model of force-balance MEMS comb accelerometers. The system-level model of force-balance MEMS comb accelerometers including the parametric model of the sense element and the interface electronics is established in MATLAB. The simulation results show that the designed force-balance comb accelerometer has high sensitivity, wide range, low nonlinear distortion and wide bandwidth.