A new height-adjustable aeroMEMS surface fence probe fabricated in SOI technology for high resolution wall shear stress measurement in turbulent flows

Author

Schiffer, M. ; Obermeier, E. ; Grewe, F. ; Ebner, A. ; Fernholz, H.H.

Author_Institution

Microsensor & Actuator Technol., Tech. Univ. of Berlin, Germany

Volume

1

fYear

2005

Firstpage

601

Abstract

A sophisticated sensor design of the aeroMEMS surface fence probe for wall shear stress measurements in turbulent flow is presented. The fence deflection (proportional to the wall shear stress) is directly measured by a piezoresistive Wheatstone bridge. The fence is 5 mm wide, 700 μm (max.) high and 7 μm and 13 μm thick, respectively. The cantilever height is 1700 μm or 2200 μm. The sensing element rests on a silicon body of 5200×7500 μm². A sensitivity up to 6 mV/(V·N/m²), a resolution of up to 10^-4 N/m² and a symmetrical behavior for bidirectional measurements was obtained in a measurement range of ±0.3 N/m². Two pn-diodes were implemented for temperature monitoring (sensitivity: -2 mV/K @ 100 μA).

Keywords

micromachining; microsensors; piezoresistive devices; sensitivity; shear flow; silicon-on-insulator; stress effects; stress measurement; turbulence; 0.3 N/m²; 100 muA; 7 to 7500 micron; SOI technology; Si; cantilever height; fence deflection; height-adjustable aeroMEMS surface fence probe; high resolution wall shear stress measurement; piezoresistive Wheatstone bridge; pn-diodes; silicon body; temperature monitoring; turbulent flow; Actuators; Bridge circuits; Conductors; Piezoresistance; Piezoresistive devices; Pressure measurement; Probes; Silicon; Stress measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496489

Filename

1496489