Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement

Author

Keplinger, Franz ; Beigelbeck, Roman ; Kohl, Franz ; Kvasnica, Samuel ; Jachimowicz, Artur ; Jakoby, Bemhard

Author_Institution

Inst. of Sensor & Actuator Syst., Vienna Univ. of Technol., Austria

Volume

1

fYear

2005

Firstpage

630

Abstract

Utilizing the symmetrical and the antisymmetrical vibration modes of a micromachined U-shaped cantilever, a magnetic field sensor, allowing the simultaneous measurement of two orthogonal field components, can be produced. This device enables the measurement of magnetic flux densities over seven decades (starting from about 10^-6 T). We discuss analytical models describing various cantilever vibration modes and their verification by a device prototype.

Keywords

magnetic field measurement; magnetic sensors; micromachining; microsensors; transient analysis; vibrations; antisymmetrical vibration modes; cantilever vibration modes; magnetic field measurement; magnetic field sensor; magnetic flux densities; micromachined U-shaped cantilever devices; symmetrical vibration modes; Actuators; Arm; Density measurement; Frequency; Gold; Magnetic field measurement; Magnetic sensors; Sensor systems; Transient analysis; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496496

Filename

1496496